Oxygen ion energy distribution: Role of ionization,...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2005 Vol. 23; Iss. 4

Oxygen ion energy distribution: Role of ionization, resonant, and nonresonant charge-exchange collisions

Babaeva, N. Yu., Lee, J. K., Shon, J. W., Hudson, E. A.
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Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1943451
File:
PDF, 382 KB
english, 2005
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