Simulations of dual rf-biased sheaths and ion energy...

Physics of Plasmas 2005 Vol. 12; Iss. 12

Simulations of dual rf-biased sheaths and ion energy distributions arriving at a dual rf-biased electrode

Guan, Zhen-Qun, Dai, Zhong-Ling, Wang, You-Nian
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Volume:
12
Year:
2005
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.2142247
File:
PDF, 549 KB
english, 2005
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