Time-resolved measurements of highly polymerized negative...

Journal of Applied Physics 1994 Vol. 75; Iss. 3

Time-resolved measurements of highly polymerized negative ions in radio frequency silane plasma deposition experiments

Howling, A. A., Sansonnens, L., Dorier, J.-L., Hollenstein, Ch.
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Volume:
75
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.356413
File:
PDF, 2.11 MB
english, 1994
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