Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 3
Studies on Al/ZrO[sub 2]/GaAs metal-oxide-semiconductor capacitors and determination of its electrical parameters in the frequency range of 10 kHz–1 MHz
Kundu, Souvik, Roy, Sandipta, Banerji, P., Chakraborty, Supratic, Shripathi, T.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3585608
File:
PDF, 1009 KB
english, 2011