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Effect of graded-temperature arsenic prelayer on quality of...

Effect of graded-temperature arsenic prelayer on quality of GaAs on Ge/Si substrates by metalorganic vapor phase epitaxy

Yu, H. W., Chang, E. Y., Yamamoto, Y., Tillack, B., Wang, W. C., Kuo, C. I., Wong, Y. Y., Nguyen, H. Q.
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Volume:
99
Year:
2011
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3656737
File:
PDF, 1.19 MB
english, 2011
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