High-k shallow traps observed by charge pumping with...

Journal of Applied Physics 2013 Vol. 114; Iss. 17

High-k shallow traps observed by charge pumping with varying discharging times

Ho, Szu-Han, Chang, Ting-Chang, Lu, Ying-Hsin, Wang, Bin-Wei, Lo, Wen-Hung, Chen, Ching-En, Tsai, Jyun-Yu, Chen, Hua-Mao, Liu, Kuan-Ju, Tseng, Tseung-Yuen, Cheng, Osbert, Huang, Cheng-Tung, Chen, Tsai
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Volume:
114
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4828719
File:
PDF, 3.85 MB
english, 2013
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