Diamondlike carbon film deposition using a reactive pulsed...

Journal of Applied Physics 1989 Vol. 66; Iss. 10

Diamondlike carbon film deposition using a reactive pulsed electromagnetic inductive plasma process

Ebihara, Kenji, Ikegami, Tomoaki, Matsumoto, Toshiyuki, Nishimoto, Hirofumi, Maeda, Sadao, Harada, Kazuhiko
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Volume:
66
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.343772
File:
PDF, 821 KB
english, 1989
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