Reduction of saucer pit microdefects in epitaxial silicon...

Applied Physics Letters 1980 Vol. 36; Iss. 8

Reduction of saucer pit microdefects in epitaxial silicon wafer by intrinsic gettering

Tsuya, Hideki, Tanno, Kohetsu, Shimura, Fumio
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Volume:
36
Year:
1980
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.91615
File:
PDF, 405 KB
english, 1980
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