Fluorine field ion source using fluorine–helium gas mixture

Fluorine field ion source using fluorine–helium gas mixture

Ochiai, Yukinori
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Volume:
9
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.577129
Date:
January, 1991
File:
PDF, 734 KB
english, 1991
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