[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - The implementation of AFM for process monitoring and metrology in trench MOSFET device manufacturing
Ridley, R.S., Strate, C., Cumbo, J., Grebs, T., Gasser, C.Year:
2002
Language:
english
DOI:
10.1109/asmc.2002.1001642
File:
PDF, 687 KB
english, 2002