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Effective Schottky Barrier Height Reduction Using Sulfur or Selenium at the NiSi/n-Si (100) Interface for Low Resistance Contacts
Wong, Hoong-Shing, Chan, Lap, Samudra, Ganesh, Yeo, Yee-ChiaVolume:
28
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2007.910003
Date:
December, 2007
File:
PDF, 216 KB
english, 2007