Current research and development topics on gas cluster ion-beam processes
Yamada, Isao, Toyoda, NoriakiVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1894419
File:
PDF, 1.13 MB
english, 2005