Highly selective etching of silicon nitride over silicon...

Highly selective etching of silicon nitride over silicon and silicon dioxide

Kastenmeier, B. E. E., Matsuo, P. J., Oehrlein, G. S.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582097
File:
PDF, 418 KB
english, 1999
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