Spectroscopic ellipsometry measurements of chromium nitride coatings
Aouadi, S. M., Mihut, D. M., Kuruppu, M. L., Kirkpatrick, S. R., Rohde, S. L.Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1405513
File:
PDF, 344 KB
english, 2001