![](/img/cover-not-exists.png)
[IEEE 1996 54th Annual Device Research Conference Digest - Santa Barbara, CA, USA (24-26 June 1996)] 1996 54th Annual Device Research Conference Digest - Improvement of deep submicron buried-channel p-MOSFET by As and P co-implantation for punchthrough stopper
Jeonghwan Son,, Sangdon Lee,, Kijae Huh,, Jeongmo Hwang,Year:
1996
Language:
english
DOI:
10.1109/drc.1996.546298
File:
PDF, 134 KB
english, 1996