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CHF 3 Dual-Frequency Capacitively Coupled Plasma by Optical Emission Spectroscopy
Yi-Jun, Xu, Chao, Ye, Xiao-Jiang, Huang, Jing, Yuan, Zhen-Yu, Xing, Zhao-Yuan, NingVolume:
25
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/25/8/057
Date:
August, 2008
File:
PDF, 200 KB
english, 2008