Additional fluorine passivation to pyrolytic-N[sub 2]O...

Additional fluorine passivation to pyrolytic-N[sub 2]O passivated ultrathin silicon oxide/Si(100) films

Yamada, Hiroshi
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Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2222403
File:
PDF, 397 KB
english, 2006
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