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Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges
Wang, Yicheng, Benck, Eric C., Misakian, Martin, Edamura, Manabu, Olthoff, James K.Volume:
87
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.372148
File:
PDF, 385 KB
english, 2000