Technique for the production, preservation, and...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2005 Vol. 23; Iss. 6

Technique for the production, preservation, and transportation of H atoms in metal chambers for processings

Ansari, S. G., Umemoto, Hironobu, Morimoto, Takashi, Yoneyama, Koji, Masuda, Atsushi, Matsumura, Hideki, Ikemoto, Manabu, Ishibashi, Keiji
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Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2101809
File:
PDF, 536 KB
english, 2005
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