[IEEE 2011 IEEE International Conference on Mechatronics and Automation (ICMA) - Beijing, China (2011.08.7-2011.08.10)] 2011 IEEE International Conference on Mechatronics and Automation - Stressed nanomechanical resonator fabrication utilizing stiction phenomena
Ashiba, Hiroki, Kometani, Reo, Warisawa, Shin-ichi, Ishihara, SunaoYear:
2011
Language:
english
DOI:
10.1109/icma.2011.5985855
File:
PDF, 1.27 MB
english, 2011