Glow discharge processing to enhance field-emitter array...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1994 / 7 Vol. 12; Iss. 4

Glow discharge processing to enhance field-emitter array performance

Schwoebel, P. R.
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Volume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.587774
Date:
July, 1994
File:
PDF, 1.07 MB
english, 1994
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