Negative hydrogenated silicon ion clusters as particle...

Journal of Physics D Applied Physics 1993 / 06 Vol. 26; Iss. 6

Negative hydrogenated silicon ion clusters as particle precursors in RF silane plasma deposition experiments

Howling, A A, Sansonnens, L, Dorier, J -L, Hollenstein, C
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Volume:
26
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/26/6/019
Date:
June, 1993
File:
PDF, 275 KB
english, 1993
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