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KrF excimer laser projection patterned deposition of...

KrF excimer laser projection patterned deposition of aluminum from triethylamine alane as adsorbate precursor

Foulon, F., Stuke, M.
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Volume:
62
Year:
1993
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.109459
File:
PDF, 652 KB
english, 1993
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