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Oxygen environmental Auger electron spectroscopy: Eliminating the electron beam effects on Al[sub 2]O[sub 3] during Auger analysis
Guo, Hansheng, Maus-Friedrichs, W., Kempter, V., Ji, Y.Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1582453
File:
PDF, 391 KB
english, 2003