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Molecular dynamics simulation of the regrowth of nanometric multigate Si devices
Marqués, Luis A., Pelaz, Lourdes, Santos, Iván, López, Pedro, Duffy, RayVolume:
111
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3679126
File:
PDF, 8.95 MB
english, 2012