Schottky field emission based scanning Auger microprobe

Schottky field emission based scanning Auger microprobe

Narum, David H.
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Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586652
Date:
November, 1993
File:
PDF, 833 KB
english, 1993
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