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Laser-induced damage threshold of ZrO[sub 2] thin films prepared at different oxygen partial pressures by electron-beam evaporation
Zhang, Dongping, Shao, Jianda, Zhao, Yuanan, Fan, Shuhai, Hong, Ruijing, Fan, ZhengxiuVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1842111
File:
PDF, 484 KB
english, 2005