Formation of negative ions in Cs sputter sources

Formation of negative ions in Cs sputter sources

Yntema, J. L., Billquist, P. J.
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Volume:
57
Year:
1986
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1138852
File:
PDF, 509 KB
english, 1986
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