Study of the effect of layer thickness, beam energy, and...

Study of the effect of layer thickness, beam energy, and metal density on the resistless silicide direct-write electron-beam lithography process for the fabrication of nanostructures

Lavallée, Eric, Beauvais, Jacques, Drouin, Dominique, Corbin, Jacques
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Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582247
File:
PDF, 372 KB
english, 2000
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