Carrier separation measurement of leakage current under prebreakdown in ultrathin SiO[sub 2] films
Uno, Shigeyasu, Ishida, Akihiro, Deguchi, Kazuaki, Kamakura, Yoshinari, Taniguchi, KenjiVolume:
89
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1370087
File:
PDF, 443 KB
english, 2001