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Journal of Microelectromechanical Systems blank page
Lackner, F., Bertinelli, F., Fessia, P., Lopez, R., Prin, H., Tock, J. P.Volume:
14
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.858907
Date:
October, 2005
File:
PDF, 2 KB
2005