[IEEE IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society - Taipei, Taiwan (2007.11.5-2007.11.8)] IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society - Development of a Three-Degrees-of-Freedom Laser Linear Encoder for error measurement of a High Precision Stage
Liu, Chien-Hung, Jywe, Wen-Yuh, Wang, Ming-Shi, Huang, Hsueh-LiangYear:
2007
Language:
english
DOI:
10.1109/iecon.2007.4460368
File:
PDF, 3.17 MB
english, 2007