Evidence for amorphous multilayered silicon obtained by...

Evidence for amorphous multilayered silicon obtained by deposition under modulated pressure of hydrogen

Vergnat, M., George, B., Bruson, A., Marchal, G., Mangin, Ph., Demai, J. J.
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Volume:
64
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.341282
File:
PDF, 448 KB
english, 1988
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