[IEEE 4th International Conference on Solid-State and IC Technology - Beijing, China (24-28 Oct. 1995)] Proceedings of 4th International Conference on Solid-State and IC Technology - A comparison of direct Monte-Carlo and DOE simulations for optimising IC processes
Xuewen Gan,, Walton, A.J.Year:
1995
Language:
english
DOI:
10.1109/icsict.1995.503369
File:
PDF, 230 KB
english, 1995