Metal-organic chemical-vapor deposition of high-reflectance...

Metal-organic chemical-vapor deposition of high-reflectance III-nitride distributed Bragg reflectors on Si substrates

Mastro, M. A., Holm, R. T., Bassim, N. D., Gaskill, D. K., Culbertson, J. C., Fatemi, M., Eddy, C. R., Henry, R. L., Twigg, M. E.

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Volume:

Year:

2006

Language:

english

Journal:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

DOI:

10.1116/1.2172937

File:

PDF, 690 KB

english, 2006

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