Engineering epitaxial γ-Al[sub 2]O[sub 3] gate dielectric films on 4H-SiC
Tanner, Carey M., Toney, Michael F., Lu, Jun, Blom, Hans-Olof, Sawkar-Mathur, Monica, Tafesse, Melat A., Chang, Jane P.Volume:
102
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2812609
File:
PDF, 719 KB
english, 2007