Method to obtain nonuniformity information from field...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2010 Vol. 28; Iss. 3

Method to obtain nonuniformity information from field emission behavior

Dall’Agnol, Fernando F., de Paulo, Alexandre C., Paredez, Pablo, den Engelsen, Daniel, Santos, Thebano E. A., Mammana, Victor P.
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3327928
File:
PDF, 1.30 MB
english, 2010
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