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Electrical description of a magnetic pole enhanced inductively coupled plasma source: Refinement of the transformer model by reverse electromagnetic modeling
Meziani, T., Colpo, P., Rossi, F.Volume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2164536
File:
PDF, 928 KB
english, 2006