Electrical description of a magnetic pole enhanced...

Electrical description of a magnetic pole enhanced inductively coupled plasma source: Refinement of the transformer model by reverse electromagnetic modeling

Meziani, T., Colpo, P., Rossi, F.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2164536
File:
PDF, 928 KB
english, 2006
Conversion to is in progress
Conversion to is failed