Growth of dense SiC films on Si at medium temperatures by...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2001 Vol. 19; Iss. 5

Growth of dense SiC films on Si at medium temperatures by pulsed laser deposition

Craciun, Valentin, Lambers, Eric, Bassim, Nabil D., Baney, Ronald H., Singh, Rajiv K.
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1372899
File:
PDF, 526 KB
english, 2001
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