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[IEEE 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (21-25 July 1997)] Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Sample preparation for electron beam testing with reactive ion etching
Numajiri, T., Suzuki, S., Omata, T., Yoshida, N., Tsujita, Y.Year:
1997
Language:
english
DOI:
10.1109/ipfa.1997.638121
File:
PDF, 1.08 MB
english, 1997