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Nonlinear femtosecond laser processing of alkylsiloxane monolayers on surface-oxidized silicon substrates
Franzka, Steffen, Koch, Jürgen, Chichkov, Boris N., Hartmann, NilsVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3281296
File:
PDF, 596 KB
english, 2010