[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Piezoactuator-integrated monolithic microstage with six degrees of freedom
De-Yuan Zhang,, Ono, T., Esashi, M.Volume:
2
Year:
2003
Language:
english
DOI:
10.1109/sensor.2003.1217066
File:
PDF, 350 KB
english, 2003