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Estimation of the TEOS dissociation coefficient by electron impact
Vallée, C., Rhallabi, A., Granier, A., Goullet, A., Turban, G.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1319820
File:
PDF, 550 KB
english, 2000