GaInAsP/InP lasers with etched mirrors by reactive ion etching using a mixture of ethane and hydrogen
Matsui, Teruhito, Sugimoto, Hiroshi, Ohishi, Toshiyuki, Abe, Yuji, Ohtsuka, Ken’ichi, Ogata, HitoshiVolume:
54
Year:
1989
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.100749
File:
PDF, 417 KB
english, 1989