Characterization of amorphous carbon thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1996 / 3 Vol. 14; Iss. 2

Characterization of amorphous carbon thin films

Capano, M. A.
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Volume:
14
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.580101
Date:
March, 1996
File:
PDF, 374 KB
english, 1996
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