Observation of the bottom surface of contact holes by...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1994 / 5 Vol. 12; Iss. 3

Observation of the bottom surface of contact holes by hopping scanning atomic force microscopy with a ZnO whisker tip

Kado, Hiroyuki
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Volume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.587671
Date:
May, 1994
File:
PDF, 599 KB
english, 1994
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