Investigation of oxygen diffusion barrier properties of...

Integrated Ferroelectrics 2001 / 01 Vol. 37; Iss. 1-4

Investigation of oxygen diffusion barrier properties of reactively sputtered iro 2 thin films

Pinnow, Cay Uwe, Kasko, Igor, Nagel, Nicolas, Dehm, Christine, Jahnel, Franz, Primig, Robert, Seibt, Michael, Geyer, Ulrich, Samwer, Konrad
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Volume:
37
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108015662
Date:
January, 2001
File:
PDF, 332 KB
english, 2001
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