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Single-crystal silicon microblocks produced by a selective recrystallization technique
Hayama, Hiroshi, Mukainari, Masahito, Saito, TakeshiVolume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354307
File:
PDF, 1.26 MB
english, 1993