Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2001 Vol. 19; Iss. 6
Contact resistance of focused ion beam deposited platinum and tungsten films to silicon
DeMarco, Anthony J., Melngailis, JohnVolume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1410094
File:
PDF, 339 KB
english, 2001