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Formation of buried TiN in glass by ion implantation to reduce solar load
Was, Gary S., Rotberg, Victor, Platts, Dennis, Bomback, John, Benoit, RobertVolume:
80
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363194
File:
PDF, 785 KB
english, 1996